MEMS based- high performance tilt sensor SX40000


MEMS based- high performance tilt sensor SX40000


Meggitt (Sensorex) selected the best MEMS cells available on the market and associated them to the digital signal compensation and processing stage to obtain a tilt sensor that matches the key performances of servo-inclinometers, at an optimized cost.

It achieves a maximum scale factor non-linearity error <0.05% Full Scale, a maximum bias calibration residual error on [-40°C/+85°C] of ±0.057° and a maximum scale factor calibration residual error on [-40°C/+85°C] of ±0.5%.

SX40000 tilt sensor achieves superior performances under vibrations (low bias rectification error, low noise) with the use of over-damped sensitive elements and a very innovative differential measurement principle. Furthermore, the sensitive elements are designed to withstand very high g shocks (200g/ 6ms).

Power supply can span from +4.5 to +30VDC. This unit is available in 6 different ranges, ±3°, ±14.5°, ±70°. Signals are made available to the end-user as 4-20mA, RS485 and USB outputs.

Specifically designed to operate in stringent vibratory environments, one of the key parameters of our MEMS tilt sensor is its adjustable bandwidth between 0.01Hz and 10Hz (thanks to a configurable digital filter).

A complete auto test is automatically made at the start of the sensor and results are transmitted to the digital outputs and to the TOR BIT-OUT output.



  • Robotics
  • Safety purposes (cranes, platforms…)
  • Civil engineering monitoring (alignment of structures)
  • Industrial & machining equipment
  • Antenna positioning
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